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PRODUCT
§≡≡≡≡ Description ≡≡≡≡SuperView W3 Optical 3D Surface profilometer is an ideal instrument for sub-Nanometer measurement of various precision parts. Based on the principle of white light interference technology, combined with precision Z-direction scanning module and 3D modeling algorithm, it contactlessly scans the surface of the object then establish a 3D image for the surface. A serial of 2D, 3D parameters reflecting surface quality of the object are obtained after XtremeVision software processes and analyzes the 3D image. The SuperView W3 is a user-friendly precision optical instrument with powerful analysis functions for all kinds of surface form & roughness parameters. With unique light source it could measure various precision parts with both smooth and rough surface. 
§≡≡≡≡ Parameters ≡≡≡≡
| Model No. | SuperView W3 | ||
| Light source | Green LED | ||
| Video system | 1024×1024 | ||
| Standard Field of View | 0.98×0.98 mm | ||
| Max Field of View | 6.0×6.0 mm(Optional) | ||
| Lens holder | 3 holes-manual | ||
| XY Object table | Size | 450×450mm | |
| Moving range | 300×300mm | ||
| Loading capacity | 10kg | ||
| Control method | Motorized | ||
| Level adjustment | Lens tilt, motorized | ||
| Z Axis focusing | Moving range | 100mm | |
| Control method | Motorized | ||
| Max scanning speed | 45µm/s | ||
| Scanning range of Z axis | 10mm | ||
| Resolution of Z axis | 0.1nm | ||
| Lateral Resolution | 0.1μm | ||
| Stage measurement | Uncertainty | 0.3% | |
| Repeatability | 0.08% 1σ | ||
| Size | L1000*W900*H1500mm | ||
| Weight | <500KG | ||
| Power | AC200~240V, 50/60Hz, 4A, 600W | ||
Remark: Performance parameters are tested by using a 4.7µm precision master stage gauge in lab according to ISO 4287 and ISO 25178.
Zoom ratio of lens | 2.5× | 5× | 10× | 20× | 50× | 100× | ||
Numerical hole diameter | 0.075 | 0.13 | 0.3 | 0.4 | 0.55 | 0.7 | ||
Optical resolution @550nm(µm) | 3.7 | 2.1 | 0.92 | 0.69 | 0.5 | 0.4 | ||
Depth of focus(µm) | 48.6 | 16.2 | 3.04 | 1.71 | 0.9 | 0.56 | ||
Working distance(mm) | 10.3 | 9.3 | 7.4 | 4.7 | 3.4 | 2.0 | ||
Field H×V (mm) | Video system 1024×1024 | 0.5× | 3.92×3.92 | 1.96×1.96 | 0.98×0.98 | 0.49×0.49 | 0.196×0.196 | 0.098×0.098 |
0.75× | 2.6×2.6 | 1.3×1.3 | 0.65×0.65 | 0.325×0.325 | 0.13×0.13 | 0.065×0.065 | ||
1× | 1.96×1.96 | 0.98×0.98 | 0.49×0.49 | 0.245×0.245 | 0.098×0.098 | 0.049×0.049 | ||
※ Built-in ISO/ASME/EUR/GBT Standards of 2D, 3D parameters:
2D Parameters
Standard | Parameters | |||
ISO 4287-1997 | Principal section | Roughness | Waviness | |
Amplitude | Pp, Pv ,Pz, Pc, Pt,Pa,Pq,Psk,Pku | Rp, Rv ,Rz, Rc, Rt,Ra,Rq,Rsk,Rku | Wp, Wv ,Wz, Wc, Wt,Wa,Wq,Wsk,Wku | |
interval | PSm,Pdq | RSm,Rdq | WSm,Wdq | |
Substance | Pmr,Pdc | Rmr,Rdc,Rmr(Rz/4) | Wmr,Wdc,Wmr(Wz/4) | |
Peak | PPc | RPc | WPc | |
ISO 13565 | ISO 13565-2 | Rk,Rpk,Rvk,Mr1,Mr2,A1,A2,Rpk,Rvk | ||
ISO 12085 | Roughness graph | R,AR,R× ,Nr | ||
Waviness graph | W,AW,W×,Wte | |||
Other graph | Rke,Rpke,Rvke | |||
AMSE B46.1 | 2D | Rt,Rp,Rv,Rz,Rpm,Rma×,Ra,Rq,Rsk,Rku,tp,Htp,Pc,Rda,Rdq,RSm,Wt | ||
DIN EN ISO 4287-2010 | Original profile | Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr, | ||
Roughness | Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,RPc,Rdq,Rdc,Rmr, | |||
Waviness | Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr | |||
JIS B0601-2013 | Original profile | Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr, | ||
Roughness | Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr | |||
Waviness | Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr | |||
GBT 3505-2009 | Original profile | Pa,Pq,Pp,Pv,Pz,Pc,Pt,PSk,PKu,PSm,PPc,Pdq,Pdc,Pmr, | ||
Roughness | Ra,Rq,Rp,Rv,Rz,Rc,Rt,RSk,RKu,RSm,Rdq,Rdc,Rmr | |||
Waviness | Wa,Wq,Wp,Wv,Wz,Wc,Wt,WSk,WKu,WSm,WPc,Wdq,Wdc,Wmr | |||
3D Parameters
Standard | Parameters | |
ISO 25178 | Height | Sq,Ssk,Sku,Sp,Sv,Sz,Sa |
function | Smr,Smc,S×p | |
Space | Sal,Str,Std | |
Composite parameters | Sdq,Sdr | |
Volume | Vm,Vv,Vmp,Vmc,Vvc,Vvv | |
Form | Spd,Spc,S10z,S5p,S5v,Sda,Sha,Sdv,Shv | |
Functional | Sk,Spk,Svk,Smr1,Smr2,Spq,Svq,Smq | |
ISO 12781 | Flatness | FLTt,FLTp,FLTv,FLTq |
EUR 15178N | Amplitude | Sa,Sq,Sz,Ssk,Sku,Sp,Sv,St |
Space | Str,Std,Sal | |
Composite parameters | Sdq,Sds,Ssc,Sdr,Sfd | |
Area, Volume | Smr,Sdc | |
Function | Sk,Spk,Svk,Sr1,Sr2,Spq,Svq,Smq | |
Functional | Sbi,Sci,Svi | |
EUR 16145 EN | Amplitude | Sa,Sq,Sy,Sz,Ssk,Sku |
Mixed parameters | Ssc,Sdq,Sdr | |
Functional | Sbi,Sci,Svi,Sk,Spk,Svk | |
Space | Sds,Std,Stdi,Srw,Srwi | |
Hardness | Hs,Hvol,Hv,Hps,Hpvol,Hpv,Hap,Hbp | |
ASME B46.1 | 3D | St,Sp,Sv,Sq,Sa,Ssk,Sku,SWt |
§≡≡≡≡ Applications ≡≡≡≡
It is used for measurement and analysis of surface roughness and profile of precision components from industries of semi-conductor, 3C Electronics, ultraprecise machining, optical machining, micro-nano materials, micro-electro-mechanical system.
Measurement and analysis for various products, components and materials`surface form and profile characteristics, such as flatness, roughness, waviness, appearance, surface defect, abrasion,corrosion, gap, hole, stage, curvature, deformation, etc.
3C Electronics_Sapphire crystal
3C Electronics _ Ink screen
